P01400 - SEMI P14 - Determination of Tin in Positive Photoresists by Graphite Furnace Atomic Absorption Spectroscopy StdTpc-Leadframes this Safety Guideline may be

this Safety Guideline may be used to evaluate subsystems to determine if integrating them into a PLHS will cause the PLHS not to conform to this Safety Guideline

SEMI M54-0319 (technical revision)

orgで入手可能となる。初版は2001年発行。前版は2006年11月発行。

This Practice describes conversions between dopant density and resistivity for arsenic-

and the areas needed for maintenance and service

P01400 - SEMI P14 - Determination of Tin in Positive Photoresists by Graphite Furnace Atomic Absorption Spectroscopy StdTpc-Leadframes this Safety Guideline may beNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This procedure is a graphite furnace atomic absorption analytical method for tin in photoresist. The applicable concentration range is 0. 1 to 1 ppm when the sample is diluted one to ten. The precision was found to be