F07600 - SEMI F76 - Test Method for Evaluation of Particle Contribution from Gas System Components Exposed to Corrosive Gas Revision:SEMI F76-0303 (Reapproved 1110) - Superseded and SEMI C6

and SEMI C6

The EUV Pod consists of an outer pod and a protective inner pod

To comply with this Specification

SEMI MF1727-1110 (Reapproved 1115)

6-0703 (first published)

F07600 - SEMI F76 - Test Method for Evaluation of Particle Contribution from Gas System Components Exposed to Corrosive Gas Revision:SEMI F76-0303 (Reapproved 1110) - Superseded and SEMI C6This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2018. Available at www. semiviews. org and www. semi. org in March 2018; originally published March 2003; previously published November 2010. NOTICE: This Document was reapproved with minor editorial changes. This is a test method to compare gas handling components for