S02000 - SEMI S20 - Safety Guideline for Identification and Documentation of Energy Isolation Devices for Hazardous Energy Control StdPbc-0211

S02000 - SEMI S20 - Safety Guideline for Identification and Documentation of Energy Isolation Devices for Hazardous Energy Control StdPbc-0211This standard was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 29, 2008. It was available at www. semi. org in October 2008. Originally published March 2003. NOTICE: This document was balloted and approved for withdrawal in 2008. This guideline is intended to establish a method for the unique identification of Energy Isolation

このスタンダードの範囲は，装置の動作状態および生産装置の基本的な装置性能をトラッキングするために必要なデータを定義することである。これらの要件は，ホストやオペレータの入力なしに，装置レベルとモジュールレベルでのトラッキングを容易にし，かつホストに状態情報を伝達してシンプルな装置性能のトラッキングを実行することを目的とする。

SEMI C36-0200 (technical revision)

The test method is applicable to square or pseudo-square multi- as well as single-crystalline Si wafers with edge length ≥125 mm and with thickness ≥100 µm

SEMI G18 — Materials Used in the Production of Etched Leadframes for Semiconductor Devices

local operation

SEMI 3D4-0613 (first published)

SEMI文書，特にSEMI P35から構造や用語を引用している。

SEMI E78-0708 (technical revision)

SEMI M88-0119 (first published)

although it may be used as a guideline for melts from blended materials

SEMI MF1388-1106 (technical revision)

This Document provides guidance on how this information should be communicated when requested by the applicable SEMI ‘S’ Document or the evaluation purchaser