E05700 - SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers StdTpc-XML The following areas are to

The following areas are to be addressed in this Document:

and specifying that the equipment shall allow individual actuation of each of these parameters using SEMI standard methods

org June 2003

1  The purpose of this Standard is to standardize requirements for mixed acid etchants used in the semiconductor industry and testing procedures to support those standards

2  Chemical reagents may include acids

E05700 - SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers StdTpc-XML The following areas are toThis Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 11, 2016. Available at www. semiviews. org and www. semi. org in June 2016; originally published in 1996; previously published November 2010. This Standard specifies the mechanical couplings used to ergonomically align and precisely support 300 mm wafer