E08200 - SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) Revision:SEMI E82-1105 - Superseded 5 range) and describes analytical

5 range) and describes analytical techniques using gas phase analysis

Repeatability

It could also include a sensor that is part of the default configuration of the equipment

Wafer Manufacturing

The document will serve to clarify cost reduction items as well as benchmark cost reduction activities

E08200 - SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) Revision:SEMI E82-1105 - Superseded 5 range) and describes analyticalThis Standard establishes a Specific Equipment Model (SEM) for interbay and intrabay AMHS transport equipment (IBSEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of IBSEM equipment into an automated (e. g., semiconductor fabrication and flat panel display)