M07400 - SEMI M74 - 直径450mmメカニカルハンドリング鏡面ウェーハの仕様 Revision:SEMI M74-1108 - Superseded

M07400 - SEMI M74 - 直径450mmメカニカルハンドリング鏡面ウェーハの仕様 Revision:SEMI M74-1108 - Supersededglobal Silicon Wafer Committee2008829global Audits and Reviews Subcommittee200810www. semi. org200811CD ROM 450mmAMHS450mm450mm 450mm 5 SISystem International Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M20 Practice for Establishing a Wafer Coordinate System SEMI M59 Terminology for Silicon Technology SEMI MF533 Test Method for Thickness and Thickness Variation of Silicon Wafers SEMI MF928 Test

org in March 2010

SEMI T20-0710 (Reapproved 0416)

This will facilitate comparison of test results among worldwide laboratories used for monitoring or qualifying PV polysilicon and other PV silicon materials

SEMI E30-1103E2 (editorial revision)

such as SEMI M1 or SEMI M9

Examples of the other films except polarizing films are retardation films

it is intended for use throughout the design and development of semiconductor manufacturing equipment

This Guide also describes procedures that may be used to generate consensus property values that may form the basis for the generation of multiple sets of CRMs or reference materials (RMs)

However the quality criteria are expected to be determined by the end user based on the user-specific needs

SEMI E28-92 (Reapproved 0710)

本仕様にはキャリアIDリーダおよびキャリアIDリーダ／ライタの両方に要求される挙動および通信が含まれる。

SEMI E113-1101 (first published)