E18900 - SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD) Revision:SEMI E189-0524 - Superseded This document covers requirements for

This document covers requirements for dichlorosilane (SiH2Cl2) used in the semiconductor industry

This Safety Guideline covers essential safety issues for load ports and wafer handling robots

and professionals with elementary background in science and knowledge of operating computers

This Standard will provide references to metrologies to indirectly assess pad density

This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18

E18900 - SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD) Revision:SEMI E189-0524 - Superseded This document covers requirements forE This Standard was editorially modified to correct a publication error. A correction was made to Figure 1. This Specification provides a standardized behavior for host communication with manufacturing equipment during the removal, installation and usage of consumables and durables. This Specification defines objects and state models that define the interaction between the host and equipment in the following scenarios: Durable removal, installation,