M04000 - SEMI M40 - Guide for Measurement of Roughness of Planar Surfaces on Polished Wafers StdTpc-Flat Panel Display

M04000 - SEMI M40 - Guide for Measurement of Roughness of Planar Surfaces on Polished Wafers StdTpc-Flat Panel DisplayThis Guide incorporates the following methodologies: Standardized scan patterns for both local and full area surface characterization, A set of roughness abbreviations that describe measurement conditions in a short hand code, and Reference test methodologies for three generic types of roughness measuring instruments. These general categories may include, but are not limited to: Profilometers AFM and other scanning probe microscopes; optical

and other methods of measuring electrostatic parameters

Bonding wire

NTPv4 protocol for time synchronization is specified in this Standard because it is applicable to systems communicating by local area networks supporting multicast messaging including but not limited to Ethernet

) or specific instance of equipment

SEMI E133-0707 (technical revision)

External leadframe finishes are not included

SEMI C36-1106 (technical revision)

These EPDs are

本スタンダードは，global Flat Panel Display – Mask Committeeで技術的に承認されている。現版は2006年5月16日，global Audits and Reviews Subcommitteeにて発行が承認された。2006年6月にwww

and adds Prober Job state model to GEM Standard requirements and capabilities

SEMI E142-0305 (first published)

and optical interferometric measurement methods