E16400 - SEMI E164 - Specification for EDA Common Metadata Revision:SEMI E164-0313E - Superseded SEMI C36-0705 (technical revision)

SEMI C36-0705 (technical revision)

Test Medium — The test medium shall be nitrogen

voltage sensitivity

イオン発生限度

measurement relevance

E16400 - SEMI E164 - Specification for EDA Common Metadata Revision:SEMI E164-0313E - Superseded SEMI C36-0705 (technical revision)The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self Description. The scope of this Specification includes: Common approaches for defining specific elements of equipment metadata The metadata representation of selected SEMI Communication Standards, including those widely used in 300 mm semiconductor